1/15/2011	1:03:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2011	1:03:55 PM	Recipe started at 1:03 PM
1/15/2011	1:03:55 PM	H2 valve closed
1/15/2011	1:03:55 PM	BCl3 valve closed
1/15/2011	1:03:55 PM	PH3 valve closed
1/15/2011	1:03:55 PM	SiCl4 pre valve closed
1/15/2011	1:03:55 PM	SiCl4 post valve closed
1/15/2011	1:03:55 PM	Main Vac valve closed
1/15/2011	1:03:55 PM	Bypass valve closed
1/15/2011	1:03:55 PM	Bubbler valve closed
1/15/2011	1:03:55 PM	Helium valve opened
1/15/2011	1:03:55 PM	Helium MFC set to  500.000000
1/15/2011	1:03:55 PM	H2 MFC set to  0.000000
1/15/2011	1:03:55 PM	BCl3 MFC set to  0.000000
1/15/2011	1:03:55 PM	PHl3 MFC set to  0.000000
1/15/2011	1:03:55 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:03:55 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:03:55 PM	Tube furnace set to 0
1/15/2011	1:05:15 PM	Helium valve closed
1/15/2011	1:05:15 PM	H2 valve closed
1/15/2011	1:05:15 PM	BCl3 valve closed
1/15/2011	1:05:15 PM	PH3 valve closed
1/15/2011	1:05:15 PM	SiCl4 pre valve closed
1/15/2011	1:05:15 PM	SiCl4 post valve closed
1/15/2011	1:05:15 PM	Main Vac valve closed
1/15/2011	1:05:15 PM	Bypass valve closed
1/15/2011	1:05:15 PM	Bubbler valve closed
1/15/2011	1:05:15 PM	Helium MFC set to  0.000000
1/15/2011	1:05:15 PM	H2 MFC set to  0.000000
1/15/2011	1:05:15 PM	BCl3 MFC set to  0.000000
1/15/2011	1:05:15 PM	PHl3 MFC set to  0.000000
1/15/2011	1:05:15 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:05:15 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:05:15 PM	Tube furnace set to 0
1/15/2011	1:05:15 PM	Run finished at 1:05 PM
1/15/2011	1:05:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2011	1:09:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	1:09:52 PM	Recipe started at 1:09 PM
1/15/2011	1:09:52 PM	Helium valve closed
1/15/2011	1:09:52 PM	H2 valve closed
1/15/2011	1:09:52 PM	BCl3 valve closed
1/15/2011	1:09:52 PM	PH3 valve closed
1/15/2011	1:09:52 PM	SiCl4 pre valve closed
1/15/2011	1:09:52 PM	SiCl4 post valve closed
1/15/2011	1:09:52 PM	Main Vac valve closed
1/15/2011	1:09:52 PM	Bubbler valve closed
1/15/2011	1:09:52 PM	Bypass valve opened
1/15/2011	1:09:52 PM	Helium MFC set to  0.000000
1/15/2011	1:09:52 PM	H2 MFC set to  0.000000
1/15/2011	1:09:52 PM	BCl3 MFC set to  0.000000
1/15/2011	1:09:52 PM	PHl3 MFC set to  0.000000
1/15/2011	1:09:52 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:09:52 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:09:53 PM	Tube furnace set to 0
1/15/2011	1:10:25 PM	Helium valve closed
1/15/2011	1:10:25 PM	H2 valve closed
1/15/2011	1:10:25 PM	BCl3 valve closed
1/15/2011	1:10:25 PM	PH3 valve closed
1/15/2011	1:10:25 PM	SiCl4 pre valve closed
1/15/2011	1:10:25 PM	SiCl4 post valve closed
1/15/2011	1:10:25 PM	Bubbler valve closed
1/15/2011	1:10:25 PM	Main Vac valve opened
1/15/2011	1:10:25 PM	Bypass valve opened
1/15/2011	1:10:25 PM	Helium MFC set to  0.000000
1/15/2011	1:10:25 PM	H2 MFC set to  0.000000
1/15/2011	1:10:25 PM	BCl3 MFC set to  0.000000
1/15/2011	1:10:25 PM	PHl3 MFC set to  0.000000
1/15/2011	1:10:25 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:10:25 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:10:25 PM	Tube furnace set to 0
1/15/2011	1:10:25 PM	Run finished at 1:10 PM
1/15/2011	1:10:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	1:12:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2011	1:12:06 PM	Recipe started at 1:12 PM
1/15/2011	1:12:06 PM	H2 valve closed
1/15/2011	1:12:06 PM	BCl3 valve closed
1/15/2011	1:12:06 PM	PH3 valve closed
1/15/2011	1:12:06 PM	SiCl4 pre valve closed
1/15/2011	1:12:06 PM	SiCl4 post valve closed
1/15/2011	1:12:06 PM	Main Vac valve closed
1/15/2011	1:12:06 PM	Bypass valve closed
1/15/2011	1:12:06 PM	Bubbler valve closed
1/15/2011	1:12:06 PM	Helium valve opened
1/15/2011	1:12:06 PM	Helium MFC set to  500.000000
1/15/2011	1:12:06 PM	H2 MFC set to  0.000000
1/15/2011	1:12:06 PM	BCl3 MFC set to  0.000000
1/15/2011	1:12:06 PM	PHl3 MFC set to  0.000000
1/15/2011	1:12:06 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:12:06 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:12:06 PM	Tube furnace set to 0
1/15/2011	1:13:27 PM	Helium valve closed
1/15/2011	1:13:27 PM	H2 valve closed
1/15/2011	1:13:27 PM	BCl3 valve closed
1/15/2011	1:13:27 PM	PH3 valve closed
1/15/2011	1:13:27 PM	SiCl4 pre valve closed
1/15/2011	1:13:27 PM	SiCl4 post valve closed
1/15/2011	1:13:27 PM	Main Vac valve closed
1/15/2011	1:13:27 PM	Bypass valve closed
1/15/2011	1:13:27 PM	Bubbler valve closed
1/15/2011	1:13:27 PM	Helium MFC set to  0.000000
1/15/2011	1:13:27 PM	H2 MFC set to  0.000000
1/15/2011	1:13:27 PM	BCl3 MFC set to  0.000000
1/15/2011	1:13:27 PM	PHl3 MFC set to  0.000000
1/15/2011	1:13:27 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:13:27 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:13:27 PM	Tube furnace set to 0
1/15/2011	1:13:27 PM	Run finished at 1:13 PM
1/15/2011	1:13:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2011	1:22:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	1:22:15 PM	Recipe started at 1:22 PM
1/15/2011	1:22:15 PM	Helium valve closed
1/15/2011	1:22:15 PM	H2 valve closed
1/15/2011	1:22:15 PM	BCl3 valve closed
1/15/2011	1:22:15 PM	PH3 valve closed
1/15/2011	1:22:15 PM	SiCl4 pre valve closed
1/15/2011	1:22:15 PM	SiCl4 post valve closed
1/15/2011	1:22:15 PM	Main Vac valve closed
1/15/2011	1:22:15 PM	Bubbler valve closed
1/15/2011	1:22:15 PM	Bypass valve opened
1/15/2011	1:22:15 PM	Helium MFC set to  0.000000
1/15/2011	1:22:15 PM	H2 MFC set to  0.000000
1/15/2011	1:22:15 PM	BCl3 MFC set to  0.000000
1/15/2011	1:22:15 PM	PHl3 MFC set to  0.000000
1/15/2011	1:22:15 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:22:15 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:22:15 PM	Tube furnace set to 0
1/15/2011	1:22:47 PM	Helium valve closed
1/15/2011	1:22:47 PM	H2 valve closed
1/15/2011	1:22:47 PM	BCl3 valve closed
1/15/2011	1:22:47 PM	PH3 valve closed
1/15/2011	1:22:47 PM	SiCl4 pre valve closed
1/15/2011	1:22:47 PM	SiCl4 post valve closed
1/15/2011	1:22:47 PM	Bubbler valve closed
1/15/2011	1:22:47 PM	Main Vac valve opened
1/15/2011	1:22:47 PM	Bypass valve opened
1/15/2011	1:22:47 PM	Helium MFC set to  0.000000
1/15/2011	1:22:47 PM	H2 MFC set to  0.000000
1/15/2011	1:22:47 PM	BCl3 MFC set to  0.000000
1/15/2011	1:22:47 PM	PHl3 MFC set to  0.000000
1/15/2011	1:22:47 PM	SiCl4 MFC set to  0.000000
1/15/2011	1:22:47 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	1:22:47 PM	Tube furnace set to 0
1/15/2011	1:22:47 PM	Run finished at 1:22 PM
1/15/2011	1:22:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	1:27:40 PM	Helium MFC set to  20.000000
1/15/2011	1:27:40 PM	Helium valve opened
1/15/2011	1:47:38 PM	Helium valve closed
1/15/2011	1:48:52 PM	Helium valve opened
1/15/2011	2:04:16 PM	Helium valve closed
1/15/2011	2:05:57 PM	Helium valve opened
1/15/2011	2:26:39 PM	Helium valve closed
1/15/2011	2:27:48 PM	Recipe started at 2:27 PM
1/15/2011	2:27:48 PM	Helium valve closed
1/15/2011	2:27:48 PM	BCl3 valve closed
1/15/2011	2:27:48 PM	PH3 valve closed
1/15/2011	2:27:48 PM	SiCl4 pre valve closed
1/15/2011	2:27:48 PM	SiCl4 post valve closed
1/15/2011	2:27:48 PM	Main Vac valve closed
1/15/2011	2:27:48 PM	Bypass valve closed
1/15/2011	2:27:48 PM	Bubbler valve closed
1/15/2011	2:27:48 PM	H2 valve opened
1/15/2011	2:27:48 PM	Helium MFC set to  0.000000
1/15/2011	2:27:48 PM	H2 MFC set to  500.000000
1/15/2011	2:27:48 PM	BCl3 MFC set to  0.000000
1/15/2011	2:27:48 PM	PHl3 MFC set to  0.000000
1/15/2011	2:27:48 PM	SiCl4 MFC set to  0.000000
1/15/2011	2:27:48 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	2:27:48 PM	Tube furnace set to 0
1/15/2011	2:29:12 PM	Helium valve closed
1/15/2011	2:29:12 PM	BCl3 valve closed
1/15/2011	2:29:12 PM	PH3 valve closed
1/15/2011	2:29:12 PM	SiCl4 pre valve closed
1/15/2011	2:29:12 PM	SiCl4 post valve closed
1/15/2011	2:29:12 PM	Main Vac valve closed
1/15/2011	2:29:12 PM	Bypass valve closed
1/15/2011	2:29:12 PM	H2 valve opened
1/15/2011	2:29:12 PM	Bubbler valve opened
1/15/2011	2:29:12 PM	Helium MFC set to  0.000000
1/15/2011	2:29:12 PM	H2 MFC set to  500.000000
1/15/2011	2:29:12 PM	BCl3 MFC set to  0.000000
1/15/2011	2:29:12 PM	PHl3 MFC set to  0.000000
1/15/2011	2:29:12 PM	SiCl4 MFC set to  0.000000
1/15/2011	2:29:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	2:29:12 PM	Tube furnace set to 1000
1/15/2011	2:49:12 PM	Helium valve closed
1/15/2011	2:49:12 PM	BCl3 valve closed
1/15/2011	2:49:12 PM	Main Vac valve closed
1/15/2011	2:49:12 PM	Bypass valve closed
1/15/2011	2:49:12 PM	H2 valve opened
1/15/2011	2:49:12 PM	PH3 valve opened
1/15/2011	2:49:12 PM	SiCl4 pre valve opened
1/15/2011	2:49:12 PM	SiCl4 post valve opened
1/15/2011	2:49:12 PM	Bubbler valve opened
1/15/2011	2:49:12 PM	Helium MFC set to  0.000000
1/15/2011	2:49:12 PM	H2 MFC set to  500.000000
1/15/2011	2:49:12 PM	BCl3 MFC set to  0.000000
1/15/2011	2:49:12 PM	PHl3 MFC set to  0.300000
1/15/2011	2:49:12 PM	SiCl4 MFC set to  50.000000
1/15/2011	2:49:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	2:49:12 PM	Tube furnace set to 1000
1/15/2011	3:09:12 PM	H2 valve closed
1/15/2011	3:09:12 PM	BCl3 valve closed
1/15/2011	3:09:12 PM	PH3 valve closed
1/15/2011	3:09:12 PM	SiCl4 pre valve closed
1/15/2011	3:09:12 PM	SiCl4 post valve closed
1/15/2011	3:09:12 PM	Main Vac valve closed
1/15/2011	3:09:12 PM	Bypass valve closed
1/15/2011	3:09:12 PM	Helium valve opened
1/15/2011	3:09:12 PM	Bubbler valve opened
1/15/2011	3:09:12 PM	Helium MFC set to  500.000000
1/15/2011	3:09:12 PM	H2 MFC set to  0.000000
1/15/2011	3:09:12 PM	BCl3 MFC set to  0.000000
1/15/2011	3:09:12 PM	PHl3 MFC set to  0.000000
1/15/2011	3:09:12 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:09:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:09:12 PM	Tube furnace set to 950
1/15/2011	3:14:12 PM	H2 valve closed
1/15/2011	3:14:12 PM	BCl3 valve closed
1/15/2011	3:14:12 PM	PH3 valve closed
1/15/2011	3:14:12 PM	SiCl4 pre valve closed
1/15/2011	3:14:12 PM	SiCl4 post valve closed
1/15/2011	3:14:12 PM	Main Vac valve closed
1/15/2011	3:14:12 PM	Bypass valve closed
1/15/2011	3:14:12 PM	Helium valve opened
1/15/2011	3:14:12 PM	Bubbler valve opened
1/15/2011	3:14:12 PM	Helium MFC set to  500.000000
1/15/2011	3:14:12 PM	H2 MFC set to  0.000000
1/15/2011	3:14:12 PM	BCl3 MFC set to  0.000000
1/15/2011	3:14:12 PM	PHl3 MFC set to  0.000000
1/15/2011	3:14:12 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:14:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:14:12 PM	Tube furnace set to 900
1/15/2011	3:19:13 PM	H2 valve closed
1/15/2011	3:19:13 PM	BCl3 valve closed
1/15/2011	3:19:13 PM	PH3 valve closed
1/15/2011	3:19:13 PM	SiCl4 pre valve closed
1/15/2011	3:19:13 PM	SiCl4 post valve closed
1/15/2011	3:19:13 PM	Main Vac valve closed
1/15/2011	3:19:13 PM	Bypass valve closed
1/15/2011	3:19:13 PM	Helium valve opened
1/15/2011	3:19:13 PM	Bubbler valve opened
1/15/2011	3:19:13 PM	Helium MFC set to  500.000000
1/15/2011	3:19:13 PM	H2 MFC set to  0.000000
1/15/2011	3:19:13 PM	BCl3 MFC set to  0.000000
1/15/2011	3:19:13 PM	PHl3 MFC set to  0.000000
1/15/2011	3:19:13 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:19:13 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:19:13 PM	Tube furnace set to 850
1/15/2011	3:24:13 PM	H2 valve closed
1/15/2011	3:24:13 PM	BCl3 valve closed
1/15/2011	3:24:13 PM	PH3 valve closed
1/15/2011	3:24:13 PM	SiCl4 pre valve closed
1/15/2011	3:24:13 PM	SiCl4 post valve closed
1/15/2011	3:24:13 PM	Main Vac valve closed
1/15/2011	3:24:13 PM	Bypass valve closed
1/15/2011	3:24:13 PM	Helium valve opened
1/15/2011	3:24:13 PM	Bubbler valve opened
1/15/2011	3:24:13 PM	Helium MFC set to  500.000000
1/15/2011	3:24:13 PM	H2 MFC set to  0.000000
1/15/2011	3:24:13 PM	BCl3 MFC set to  0.000000
1/15/2011	3:24:13 PM	PHl3 MFC set to  0.000000
1/15/2011	3:24:13 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:24:13 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:24:13 PM	Tube furnace set to 800
1/15/2011	3:29:13 PM	H2 valve closed
1/15/2011	3:29:13 PM	BCl3 valve closed
1/15/2011	3:29:13 PM	PH3 valve closed
1/15/2011	3:29:13 PM	SiCl4 pre valve closed
1/15/2011	3:29:13 PM	SiCl4 post valve closed
1/15/2011	3:29:13 PM	Main Vac valve closed
1/15/2011	3:29:13 PM	Bypass valve closed
1/15/2011	3:29:13 PM	Helium valve opened
1/15/2011	3:29:13 PM	Bubbler valve opened
1/15/2011	3:29:13 PM	Helium MFC set to  500.000000
1/15/2011	3:29:13 PM	H2 MFC set to  0.000000
1/15/2011	3:29:13 PM	BCl3 MFC set to  0.000000
1/15/2011	3:29:13 PM	PHl3 MFC set to  0.000000
1/15/2011	3:29:13 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:29:13 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:29:13 PM	Tube furnace set to 750
1/15/2011	3:34:13 PM	H2 valve closed
1/15/2011	3:34:13 PM	BCl3 valve closed
1/15/2011	3:34:13 PM	PH3 valve closed
1/15/2011	3:34:13 PM	SiCl4 pre valve closed
1/15/2011	3:34:13 PM	SiCl4 post valve closed
1/15/2011	3:34:13 PM	Main Vac valve closed
1/15/2011	3:34:13 PM	Bypass valve closed
1/15/2011	3:34:13 PM	Helium valve opened
1/15/2011	3:34:13 PM	Bubbler valve opened
1/15/2011	3:34:13 PM	Helium MFC set to  500.000000
1/15/2011	3:34:13 PM	H2 MFC set to  0.000000
1/15/2011	3:34:13 PM	BCl3 MFC set to  0.000000
1/15/2011	3:34:13 PM	PHl3 MFC set to  0.000000
1/15/2011	3:34:13 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:34:13 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:34:13 PM	Tube furnace set to 700
1/15/2011	3:39:13 PM	H2 valve closed
1/15/2011	3:39:13 PM	BCl3 valve closed
1/15/2011	3:39:13 PM	PH3 valve closed
1/15/2011	3:39:13 PM	SiCl4 pre valve closed
1/15/2011	3:39:13 PM	SiCl4 post valve closed
1/15/2011	3:39:13 PM	Main Vac valve closed
1/15/2011	3:39:13 PM	Bypass valve closed
1/15/2011	3:39:13 PM	Helium valve opened
1/15/2011	3:39:13 PM	Bubbler valve opened
1/15/2011	3:39:13 PM	Helium MFC set to  500.000000
1/15/2011	3:39:13 PM	H2 MFC set to  0.000000
1/15/2011	3:39:13 PM	BCl3 MFC set to  0.000000
1/15/2011	3:39:13 PM	PHl3 MFC set to  0.000000
1/15/2011	3:39:13 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:39:13 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:39:14 PM	Tube furnace set to 0
1/15/2011	3:59:14 PM	Helium valve closed
1/15/2011	3:59:14 PM	H2 valve closed
1/15/2011	3:59:14 PM	BCl3 valve closed
1/15/2011	3:59:14 PM	PH3 valve closed
1/15/2011	3:59:14 PM	SiCl4 pre valve closed
1/15/2011	3:59:14 PM	SiCl4 post valve closed
1/15/2011	3:59:14 PM	Main Vac valve closed
1/15/2011	3:59:14 PM	Bypass valve closed
1/15/2011	3:59:14 PM	Bubbler valve closed
1/15/2011	3:59:14 PM	Helium MFC set to  0.000000
1/15/2011	3:59:14 PM	H2 MFC set to  0.000000
1/15/2011	3:59:14 PM	BCl3 MFC set to  0.000000
1/15/2011	3:59:14 PM	PHl3 MFC set to  0.000000
1/15/2011	3:59:14 PM	SiCl4 MFC set to  0.000000
1/15/2011	3:59:14 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	3:59:14 PM	Tube furnace set to 0
1/15/2011	3:59:14 PM	Run finished at 3:59 PM
1/15/2011	4:06:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	4:06:58 PM	Recipe started at 4:06 PM
1/15/2011	4:06:58 PM	Helium valve closed
1/15/2011	4:06:58 PM	H2 valve closed
1/15/2011	4:06:58 PM	BCl3 valve closed
1/15/2011	4:06:58 PM	PH3 valve closed
1/15/2011	4:06:58 PM	SiCl4 pre valve closed
1/15/2011	4:06:58 PM	SiCl4 post valve closed
1/15/2011	4:06:58 PM	Main Vac valve closed
1/15/2011	4:06:58 PM	Bubbler valve closed
1/15/2011	4:06:58 PM	Bypass valve opened
1/15/2011	4:06:58 PM	Helium MFC set to  0.000000
1/15/2011	4:06:58 PM	H2 MFC set to  0.000000
1/15/2011	4:06:58 PM	BCl3 MFC set to  0.000000
1/15/2011	4:06:58 PM	PHl3 MFC set to  0.000000
1/15/2011	4:06:58 PM	SiCl4 MFC set to  0.000000
1/15/2011	4:06:58 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	4:06:58 PM	Tube furnace set to 0
1/15/2011	4:07:31 PM	Helium valve closed
1/15/2011	4:07:31 PM	H2 valve closed
1/15/2011	4:07:31 PM	BCl3 valve closed
1/15/2011	4:07:31 PM	PH3 valve closed
1/15/2011	4:07:31 PM	SiCl4 pre valve closed
1/15/2011	4:07:31 PM	SiCl4 post valve closed
1/15/2011	4:07:31 PM	Bubbler valve closed
1/15/2011	4:07:31 PM	Main Vac valve opened
1/15/2011	4:07:31 PM	Bypass valve opened
1/15/2011	4:07:31 PM	Helium MFC set to  0.000000
1/15/2011	4:07:31 PM	H2 MFC set to  0.000000
1/15/2011	4:07:31 PM	BCl3 MFC set to  0.000000
1/15/2011	4:07:31 PM	PHl3 MFC set to  0.000000
1/15/2011	4:07:31 PM	SiCl4 MFC set to  0.000000
1/15/2011	4:07:31 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	4:07:31 PM	Tube furnace set to 0
1/15/2011	4:07:31 PM	Run finished at 4:07 PM
1/15/2011	4:07:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	4:18:55 PM	Helium MFC set to  20.000000
1/15/2011	4:18:56 PM	Helium valve opened
1/15/2011	4:28:23 PM	Helium valve closed
1/15/2011	4:29:25 PM	Helium valve opened
1/15/2011	4:46:16 PM	Helium valve closed
1/15/2011	4:47:40 PM	Recipe started at 4:47 PM
1/15/2011	4:47:40 PM	Helium valve closed
1/15/2011	4:47:40 PM	BCl3 valve closed
1/15/2011	4:47:40 PM	PH3 valve closed
1/15/2011	4:47:40 PM	SiCl4 pre valve closed
1/15/2011	4:47:40 PM	SiCl4 post valve closed
1/15/2011	4:47:40 PM	Main Vac valve closed
1/15/2011	4:47:40 PM	Bypass valve closed
1/15/2011	4:47:40 PM	Bubbler valve closed
1/15/2011	4:47:40 PM	H2 valve opened
1/15/2011	4:47:40 PM	Helium MFC set to  0.000000
1/15/2011	4:47:40 PM	H2 MFC set to  500.000000
1/15/2011	4:47:40 PM	BCl3 MFC set to  0.000000
1/15/2011	4:47:40 PM	PHl3 MFC set to  0.000000
1/15/2011	4:47:40 PM	SiCl4 MFC set to  0.000000
1/15/2011	4:47:40 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	4:47:40 PM	Tube furnace set to 0
1/15/2011	4:49:03 PM	Helium valve closed
1/15/2011	4:49:03 PM	BCl3 valve closed
1/15/2011	4:49:03 PM	PH3 valve closed
1/15/2011	4:49:03 PM	SiCl4 pre valve closed
1/15/2011	4:49:03 PM	SiCl4 post valve closed
1/15/2011	4:49:03 PM	Main Vac valve closed
1/15/2011	4:49:03 PM	Bypass valve closed
1/15/2011	4:49:03 PM	H2 valve opened
1/15/2011	4:49:03 PM	Bubbler valve opened
1/15/2011	4:49:03 PM	Helium MFC set to  0.000000
1/15/2011	4:49:03 PM	H2 MFC set to  500.000000
1/15/2011	4:49:03 PM	BCl3 MFC set to  0.000000
1/15/2011	4:49:03 PM	PHl3 MFC set to  0.000000
1/15/2011	4:49:03 PM	SiCl4 MFC set to  0.000000
1/15/2011	4:49:03 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	4:49:03 PM	Tube furnace set to 1000
1/15/2011	5:09:03 PM	Helium valve closed
1/15/2011	5:09:03 PM	BCl3 valve closed
1/15/2011	5:09:03 PM	Main Vac valve closed
1/15/2011	5:09:03 PM	Bypass valve closed
1/15/2011	5:09:03 PM	H2 valve opened
1/15/2011	5:09:03 PM	PH3 valve opened
1/15/2011	5:09:03 PM	SiCl4 pre valve opened
1/15/2011	5:09:03 PM	SiCl4 post valve opened
1/15/2011	5:09:03 PM	Bubbler valve opened
1/15/2011	5:09:03 PM	Helium MFC set to  0.000000
1/15/2011	5:09:03 PM	H2 MFC set to  500.000000
1/15/2011	5:09:03 PM	BCl3 MFC set to  0.000000
1/15/2011	5:09:03 PM	PHl3 MFC set to  0.100000
1/15/2011	5:09:03 PM	SiCl4 MFC set to  50.000000
1/15/2011	5:09:03 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:09:04 PM	Tube furnace set to 1000
1/15/2011	5:29:04 PM	H2 valve closed
1/15/2011	5:29:04 PM	BCl3 valve closed
1/15/2011	5:29:04 PM	PH3 valve closed
1/15/2011	5:29:04 PM	SiCl4 pre valve closed
1/15/2011	5:29:04 PM	SiCl4 post valve closed
1/15/2011	5:29:04 PM	Main Vac valve closed
1/15/2011	5:29:04 PM	Bypass valve closed
1/15/2011	5:29:04 PM	Helium valve opened
1/15/2011	5:29:04 PM	Bubbler valve opened
1/15/2011	5:29:04 PM	Helium MFC set to  500.000000
1/15/2011	5:29:04 PM	H2 MFC set to  0.000000
1/15/2011	5:29:04 PM	BCl3 MFC set to  0.000000
1/15/2011	5:29:04 PM	PHl3 MFC set to  0.000000
1/15/2011	5:29:04 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:29:04 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:29:04 PM	Tube furnace set to 950
1/15/2011	5:34:04 PM	H2 valve closed
1/15/2011	5:34:04 PM	BCl3 valve closed
1/15/2011	5:34:04 PM	PH3 valve closed
1/15/2011	5:34:04 PM	SiCl4 pre valve closed
1/15/2011	5:34:04 PM	SiCl4 post valve closed
1/15/2011	5:34:04 PM	Main Vac valve closed
1/15/2011	5:34:04 PM	Bypass valve closed
1/15/2011	5:34:04 PM	Helium valve opened
1/15/2011	5:34:04 PM	Bubbler valve opened
1/15/2011	5:34:04 PM	Helium MFC set to  500.000000
1/15/2011	5:34:04 PM	H2 MFC set to  0.000000
1/15/2011	5:34:04 PM	BCl3 MFC set to  0.000000
1/15/2011	5:34:04 PM	PHl3 MFC set to  0.000000
1/15/2011	5:34:04 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:34:04 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:34:04 PM	Tube furnace set to 900
1/15/2011	5:39:04 PM	H2 valve closed
1/15/2011	5:39:04 PM	BCl3 valve closed
1/15/2011	5:39:04 PM	PH3 valve closed
1/15/2011	5:39:04 PM	SiCl4 pre valve closed
1/15/2011	5:39:04 PM	SiCl4 post valve closed
1/15/2011	5:39:04 PM	Main Vac valve closed
1/15/2011	5:39:04 PM	Bypass valve closed
1/15/2011	5:39:04 PM	Helium valve opened
1/15/2011	5:39:04 PM	Bubbler valve opened
1/15/2011	5:39:04 PM	Helium MFC set to  500.000000
1/15/2011	5:39:04 PM	H2 MFC set to  0.000000
1/15/2011	5:39:04 PM	BCl3 MFC set to  0.000000
1/15/2011	5:39:04 PM	PHl3 MFC set to  0.000000
1/15/2011	5:39:04 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:39:04 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:39:04 PM	Tube furnace set to 850
1/15/2011	5:44:04 PM	H2 valve closed
1/15/2011	5:44:04 PM	BCl3 valve closed
1/15/2011	5:44:04 PM	PH3 valve closed
1/15/2011	5:44:04 PM	SiCl4 pre valve closed
1/15/2011	5:44:04 PM	SiCl4 post valve closed
1/15/2011	5:44:04 PM	Main Vac valve closed
1/15/2011	5:44:04 PM	Bypass valve closed
1/15/2011	5:44:04 PM	Helium valve opened
1/15/2011	5:44:04 PM	Bubbler valve opened
1/15/2011	5:44:04 PM	Helium MFC set to  500.000000
1/15/2011	5:44:04 PM	H2 MFC set to  0.000000
1/15/2011	5:44:04 PM	BCl3 MFC set to  0.000000
1/15/2011	5:44:04 PM	PHl3 MFC set to  0.000000
1/15/2011	5:44:04 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:44:04 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:44:04 PM	Tube furnace set to 800
1/15/2011	5:49:04 PM	H2 valve closed
1/15/2011	5:49:04 PM	BCl3 valve closed
1/15/2011	5:49:04 PM	PH3 valve closed
1/15/2011	5:49:04 PM	SiCl4 pre valve closed
1/15/2011	5:49:04 PM	SiCl4 post valve closed
1/15/2011	5:49:04 PM	Main Vac valve closed
1/15/2011	5:49:04 PM	Bypass valve closed
1/15/2011	5:49:04 PM	Helium valve opened
1/15/2011	5:49:04 PM	Bubbler valve opened
1/15/2011	5:49:04 PM	Helium MFC set to  500.000000
1/15/2011	5:49:04 PM	H2 MFC set to  0.000000
1/15/2011	5:49:04 PM	BCl3 MFC set to  0.000000
1/15/2011	5:49:04 PM	PHl3 MFC set to  0.000000
1/15/2011	5:49:04 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:49:04 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:49:05 PM	Tube furnace set to 750
1/15/2011	5:54:05 PM	H2 valve closed
1/15/2011	5:54:05 PM	BCl3 valve closed
1/15/2011	5:54:05 PM	PH3 valve closed
1/15/2011	5:54:05 PM	SiCl4 pre valve closed
1/15/2011	5:54:05 PM	SiCl4 post valve closed
1/15/2011	5:54:05 PM	Main Vac valve closed
1/15/2011	5:54:05 PM	Bypass valve closed
1/15/2011	5:54:05 PM	Helium valve opened
1/15/2011	5:54:05 PM	Bubbler valve opened
1/15/2011	5:54:05 PM	Helium MFC set to  500.000000
1/15/2011	5:54:05 PM	H2 MFC set to  0.000000
1/15/2011	5:54:05 PM	BCl3 MFC set to  0.000000
1/15/2011	5:54:05 PM	PHl3 MFC set to  0.000000
1/15/2011	5:54:05 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:54:05 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:54:05 PM	Tube furnace set to 700
1/15/2011	5:59:05 PM	H2 valve closed
1/15/2011	5:59:05 PM	BCl3 valve closed
1/15/2011	5:59:05 PM	PH3 valve closed
1/15/2011	5:59:05 PM	SiCl4 pre valve closed
1/15/2011	5:59:05 PM	SiCl4 post valve closed
1/15/2011	5:59:05 PM	Main Vac valve closed
1/15/2011	5:59:05 PM	Bypass valve closed
1/15/2011	5:59:05 PM	Helium valve opened
1/15/2011	5:59:05 PM	Bubbler valve opened
1/15/2011	5:59:05 PM	Helium MFC set to  500.000000
1/15/2011	5:59:05 PM	H2 MFC set to  0.000000
1/15/2011	5:59:05 PM	BCl3 MFC set to  0.000000
1/15/2011	5:59:05 PM	PHl3 MFC set to  0.000000
1/15/2011	5:59:05 PM	SiCl4 MFC set to  0.000000
1/15/2011	5:59:05 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	5:59:05 PM	Tube furnace set to 0
1/15/2011	6:11:23 PM	Helium valve closed
1/15/2011	6:11:23 PM	H2 valve closed
1/15/2011	6:11:23 PM	BCl3 valve closed
1/15/2011	6:11:23 PM	PH3 valve closed
1/15/2011	6:11:23 PM	SiCl4 pre valve closed
1/15/2011	6:11:23 PM	SiCl4 post valve closed
1/15/2011	6:11:23 PM	Main Vac valve closed
1/15/2011	6:11:23 PM	Bypass valve closed
1/15/2011	6:11:23 PM	Bubbler valve closed
1/15/2011	6:11:23 PM	Helium MFC set to  0.000000
1/15/2011	6:11:23 PM	H2 MFC set to  0.000000
1/15/2011	6:11:23 PM	BCl3 MFC set to  0.000000
1/15/2011	6:11:23 PM	PHl3 MFC set to  0.000000
1/15/2011	6:11:23 PM	SiCl4 MFC set to  0.000000
1/15/2011	6:11:23 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	6:11:23 PM	Tube furnace set to 0
1/15/2011	6:11:23 PM	Run finished at 6:11 PM
1/15/2011	6:12:29 PM	Helium MFC set to  20.000000
1/15/2011	6:12:30 PM	Helium valve opened
1/15/2011	6:12:42 PM	Helium valve closed
1/15/2011	6:12:46 PM	Helium MFC set to  300.000000
1/15/2011	6:12:47 PM	Helium valve opened
1/15/2011	6:12:50 PM	Bubbler valve opened
1/15/2011	6:13:03 PM	PHl3 MFC set to  0.100000
1/15/2011	6:13:04 PM	PH3 valve opened
1/15/2011	6:13:08 PM	PH3 valve closed
1/15/2011	6:13:15 PM	PHl3 MFC set to  0.200000
1/15/2011	6:13:16 PM	PH3 valve opened
1/15/2011	6:13:30 PM	PH3 valve closed
1/15/2011	6:13:35 PM	PHl3 MFC set to  0.300000
1/15/2011	6:13:36 PM	PH3 valve opened
1/15/2011	6:13:52 PM	PH3 valve closed
1/15/2011	6:15:01 PM	PHl3 MFC set to  0.000000
1/15/2011	6:15:11 PM	Bubbler valve closed
1/15/2011	6:15:13 PM	Helium valve closed
1/15/2011	6:19:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	6:19:47 PM	Recipe started at 6:19 PM
1/15/2011	6:19:47 PM	Helium valve closed
1/15/2011	6:19:47 PM	H2 valve closed
1/15/2011	6:19:47 PM	BCl3 valve closed
1/15/2011	6:19:47 PM	PH3 valve closed
1/15/2011	6:19:47 PM	SiCl4 pre valve closed
1/15/2011	6:19:47 PM	SiCl4 post valve closed
1/15/2011	6:19:47 PM	Main Vac valve closed
1/15/2011	6:19:47 PM	Bubbler valve closed
1/15/2011	6:19:47 PM	Bypass valve opened
1/15/2011	6:19:47 PM	Helium MFC set to  0.000000
1/15/2011	6:19:47 PM	H2 MFC set to  0.000000
1/15/2011	6:19:47 PM	BCl3 MFC set to  0.000000
1/15/2011	6:19:47 PM	PHl3 MFC set to  0.000000
1/15/2011	6:19:47 PM	SiCl4 MFC set to  0.000000
1/15/2011	6:19:47 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	6:19:47 PM	Tube furnace set to 0
1/15/2011	6:20:20 PM	Helium valve closed
1/15/2011	6:20:20 PM	H2 valve closed
1/15/2011	6:20:20 PM	BCl3 valve closed
1/15/2011	6:20:20 PM	PH3 valve closed
1/15/2011	6:20:20 PM	SiCl4 pre valve closed
1/15/2011	6:20:20 PM	SiCl4 post valve closed
1/15/2011	6:20:20 PM	Bubbler valve closed
1/15/2011	6:20:20 PM	Main Vac valve opened
1/15/2011	6:20:20 PM	Bypass valve opened
1/15/2011	6:20:20 PM	Helium MFC set to  0.000000
1/15/2011	6:20:20 PM	H2 MFC set to  0.000000
1/15/2011	6:20:20 PM	BCl3 MFC set to  0.000000
1/15/2011	6:20:20 PM	PHl3 MFC set to  0.000000
1/15/2011	6:20:20 PM	SiCl4 MFC set to  0.000000
1/15/2011	6:20:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	6:20:20 PM	Tube furnace set to 0
1/15/2011	6:20:20 PM	Run finished at 6:20 PM
1/15/2011	6:20:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	6:31:40 PM	Helium MFC set to  40.000000
1/15/2011	6:31:40 PM	Helium valve opened
1/15/2011	6:45:14 PM	Helium valve closed
1/15/2011	6:46:23 PM	Helium MFC set to  20.000000
1/15/2011	6:46:23 PM	Helium valve opened
1/15/2011	7:07:36 PM	Helium valve closed
1/15/2011	7:08:57 PM	Recipe started at 7:08 PM
1/15/2011	7:08:57 PM	Helium valve closed
1/15/2011	7:08:57 PM	BCl3 valve closed
1/15/2011	7:08:57 PM	PH3 valve closed
1/15/2011	7:08:57 PM	SiCl4 pre valve closed
1/15/2011	7:08:57 PM	SiCl4 post valve closed
1/15/2011	7:08:57 PM	Main Vac valve closed
1/15/2011	7:08:57 PM	Bypass valve closed
1/15/2011	7:08:57 PM	Bubbler valve closed
1/15/2011	7:08:57 PM	H2 valve opened
1/15/2011	7:08:57 PM	Helium MFC set to  0.000000
1/15/2011	7:08:57 PM	H2 MFC set to  500.000000
1/15/2011	7:08:57 PM	BCl3 MFC set to  0.000000
1/15/2011	7:08:57 PM	PHl3 MFC set to  0.000000
1/15/2011	7:08:57 PM	SiCl4 MFC set to  0.000000
1/15/2011	7:08:57 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	7:08:57 PM	Tube furnace set to 0
1/15/2011	7:10:20 PM	Helium valve closed
1/15/2011	7:10:20 PM	BCl3 valve closed
1/15/2011	7:10:20 PM	PH3 valve closed
1/15/2011	7:10:20 PM	SiCl4 pre valve closed
1/15/2011	7:10:20 PM	SiCl4 post valve closed
1/15/2011	7:10:20 PM	Main Vac valve closed
1/15/2011	7:10:20 PM	Bypass valve closed
1/15/2011	7:10:20 PM	H2 valve opened
1/15/2011	7:10:20 PM	Bubbler valve opened
1/15/2011	7:10:20 PM	Helium MFC set to  0.000000
1/15/2011	7:10:20 PM	H2 MFC set to  500.000000
1/15/2011	7:10:20 PM	BCl3 MFC set to  0.000000
1/15/2011	7:10:20 PM	PHl3 MFC set to  0.000000
1/15/2011	7:10:20 PM	SiCl4 MFC set to  0.000000
1/15/2011	7:10:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	7:10:20 PM	Tube furnace set to 1000
1/15/2011	7:30:20 PM	Helium valve closed
1/15/2011	7:30:20 PM	BCl3 valve closed
1/15/2011	7:30:20 PM	Main Vac valve closed
1/15/2011	7:30:20 PM	Bypass valve closed
1/15/2011	7:30:20 PM	H2 valve opened
1/15/2011	7:30:20 PM	PH3 valve opened
1/15/2011	7:30:20 PM	SiCl4 pre valve opened
1/15/2011	7:30:20 PM	SiCl4 post valve opened
1/15/2011	7:30:20 PM	Bubbler valve opened
1/15/2011	7:30:20 PM	Helium MFC set to  0.000000
1/15/2011	7:30:20 PM	H2 MFC set to  500.000000
1/15/2011	7:30:20 PM	BCl3 MFC set to  0.000000
1/15/2011	7:30:20 PM	PHl3 MFC set to  0.250000
1/15/2011	7:30:20 PM	SiCl4 MFC set to  50.000000
1/15/2011	7:30:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	7:30:20 PM	Tube furnace set to 1000
1/15/2011	7:50:20 PM	H2 valve closed
1/15/2011	7:50:20 PM	BCl3 valve closed
1/15/2011	7:50:20 PM	PH3 valve closed
1/15/2011	7:50:20 PM	SiCl4 pre valve closed
1/15/2011	7:50:20 PM	SiCl4 post valve closed
1/15/2011	7:50:20 PM	Main Vac valve closed
1/15/2011	7:50:20 PM	Bypass valve closed
1/15/2011	7:50:20 PM	Helium valve opened
1/15/2011	7:50:20 PM	Bubbler valve opened
1/15/2011	7:50:20 PM	Helium MFC set to  500.000000
1/15/2011	7:50:20 PM	H2 MFC set to  0.000000
1/15/2011	7:50:20 PM	BCl3 MFC set to  0.000000
1/15/2011	7:50:20 PM	PHl3 MFC set to  0.000000
1/15/2011	7:50:20 PM	SiCl4 MFC set to  0.000000
1/15/2011	7:50:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	7:50:21 PM	Tube furnace set to 950
1/15/2011	7:55:21 PM	H2 valve closed
1/15/2011	7:55:21 PM	BCl3 valve closed
1/15/2011	7:55:21 PM	PH3 valve closed
1/15/2011	7:55:21 PM	SiCl4 pre valve closed
1/15/2011	7:55:21 PM	SiCl4 post valve closed
1/15/2011	7:55:21 PM	Main Vac valve closed
1/15/2011	7:55:21 PM	Bypass valve closed
1/15/2011	7:55:21 PM	Helium valve opened
1/15/2011	7:55:21 PM	Bubbler valve opened
1/15/2011	7:55:21 PM	Helium MFC set to  500.000000
1/15/2011	7:55:21 PM	H2 MFC set to  0.000000
1/15/2011	7:55:21 PM	BCl3 MFC set to  0.000000
1/15/2011	7:55:21 PM	PHl3 MFC set to  0.000000
1/15/2011	7:55:21 PM	SiCl4 MFC set to  0.000000
1/15/2011	7:55:21 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	7:55:21 PM	Tube furnace set to 900
1/15/2011	8:00:21 PM	H2 valve closed
1/15/2011	8:00:21 PM	BCl3 valve closed
1/15/2011	8:00:21 PM	PH3 valve closed
1/15/2011	8:00:21 PM	SiCl4 pre valve closed
1/15/2011	8:00:21 PM	SiCl4 post valve closed
1/15/2011	8:00:21 PM	Main Vac valve closed
1/15/2011	8:00:21 PM	Bypass valve closed
1/15/2011	8:00:21 PM	Helium valve opened
1/15/2011	8:00:21 PM	Bubbler valve opened
1/15/2011	8:00:21 PM	Helium MFC set to  500.000000
1/15/2011	8:00:21 PM	H2 MFC set to  0.000000
1/15/2011	8:00:21 PM	BCl3 MFC set to  0.000000
1/15/2011	8:00:21 PM	PHl3 MFC set to  0.000000
1/15/2011	8:00:21 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:00:21 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:00:21 PM	Tube furnace set to 850
1/15/2011	8:04:40 PM	H2 valve closed
1/15/2011	8:04:40 PM	BCl3 valve closed
1/15/2011	8:04:40 PM	PH3 valve closed
1/15/2011	8:04:40 PM	SiCl4 pre valve closed
1/15/2011	8:04:40 PM	SiCl4 post valve closed
1/15/2011	8:04:40 PM	Main Vac valve closed
1/15/2011	8:04:40 PM	Bypass valve closed
1/15/2011	8:04:40 PM	Helium valve opened
1/15/2011	8:04:40 PM	Bubbler valve opened
1/15/2011	8:04:40 PM	Helium MFC set to  500.000000
1/15/2011	8:04:40 PM	H2 MFC set to  0.000000
1/15/2011	8:04:40 PM	BCl3 MFC set to  0.000000
1/15/2011	8:04:40 PM	PHl3 MFC set to  0.000000
1/15/2011	8:04:40 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:04:40 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:04:40 PM	Tube furnace set to 800
1/15/2011	8:04:42 PM	H2 valve closed
1/15/2011	8:04:42 PM	BCl3 valve closed
1/15/2011	8:04:42 PM	PH3 valve closed
1/15/2011	8:04:42 PM	SiCl4 pre valve closed
1/15/2011	8:04:42 PM	SiCl4 post valve closed
1/15/2011	8:04:42 PM	Main Vac valve closed
1/15/2011	8:04:42 PM	Bypass valve closed
1/15/2011	8:04:42 PM	Helium valve opened
1/15/2011	8:04:42 PM	Bubbler valve opened
1/15/2011	8:04:42 PM	Helium MFC set to  500.000000
1/15/2011	8:04:42 PM	H2 MFC set to  0.000000
1/15/2011	8:04:42 PM	BCl3 MFC set to  0.000000
1/15/2011	8:04:42 PM	PHl3 MFC set to  0.000000
1/15/2011	8:04:42 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:04:42 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:04:43 PM	Tube furnace set to 750
1/15/2011	8:05:17 PM	H2 valve closed
1/15/2011	8:05:17 PM	BCl3 valve closed
1/15/2011	8:05:17 PM	PH3 valve closed
1/15/2011	8:05:17 PM	SiCl4 pre valve closed
1/15/2011	8:05:17 PM	SiCl4 post valve closed
1/15/2011	8:05:17 PM	Main Vac valve closed
1/15/2011	8:05:17 PM	Bypass valve closed
1/15/2011	8:05:17 PM	Helium valve opened
1/15/2011	8:05:17 PM	Bubbler valve opened
1/15/2011	8:05:17 PM	Helium MFC set to  500.000000
1/15/2011	8:05:17 PM	H2 MFC set to  0.000000
1/15/2011	8:05:17 PM	BCl3 MFC set to  0.000000
1/15/2011	8:05:17 PM	PHl3 MFC set to  0.000000
1/15/2011	8:05:17 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:05:17 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:05:18 PM	Tube furnace set to 700
1/15/2011	8:10:18 PM	H2 valve closed
1/15/2011	8:10:18 PM	BCl3 valve closed
1/15/2011	8:10:18 PM	PH3 valve closed
1/15/2011	8:10:18 PM	SiCl4 pre valve closed
1/15/2011	8:10:18 PM	SiCl4 post valve closed
1/15/2011	8:10:18 PM	Main Vac valve closed
1/15/2011	8:10:18 PM	Bypass valve closed
1/15/2011	8:10:18 PM	Helium valve opened
1/15/2011	8:10:18 PM	Bubbler valve opened
1/15/2011	8:10:18 PM	Helium MFC set to  500.000000
1/15/2011	8:10:18 PM	H2 MFC set to  0.000000
1/15/2011	8:10:18 PM	BCl3 MFC set to  0.000000
1/15/2011	8:10:18 PM	PHl3 MFC set to  0.000000
1/15/2011	8:10:18 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:10:18 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:10:18 PM	Tube furnace set to 0
1/15/2011	8:29:18 PM	Helium valve closed
1/15/2011	8:29:18 PM	H2 valve closed
1/15/2011	8:29:18 PM	BCl3 valve closed
1/15/2011	8:29:18 PM	PH3 valve closed
1/15/2011	8:29:18 PM	SiCl4 pre valve closed
1/15/2011	8:29:18 PM	SiCl4 post valve closed
1/15/2011	8:29:18 PM	Main Vac valve closed
1/15/2011	8:29:18 PM	Bypass valve closed
1/15/2011	8:29:18 PM	Bubbler valve closed
1/15/2011	8:29:18 PM	Helium MFC set to  0.000000
1/15/2011	8:29:18 PM	H2 MFC set to  0.000000
1/15/2011	8:29:18 PM	BCl3 MFC set to  0.000000
1/15/2011	8:29:18 PM	PHl3 MFC set to  0.000000
1/15/2011	8:29:18 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:29:18 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:29:18 PM	Tube furnace set to 0
1/15/2011	8:29:19 PM	Run finished at 8:29 PM
1/15/2011	8:36:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2011	8:36:12 PM	Recipe started at 8:36 PM
1/15/2011	8:36:12 PM	Helium valve closed
1/15/2011	8:36:12 PM	H2 valve closed
1/15/2011	8:36:12 PM	BCl3 valve closed
1/15/2011	8:36:12 PM	PH3 valve closed
1/15/2011	8:36:12 PM	SiCl4 pre valve closed
1/15/2011	8:36:12 PM	SiCl4 post valve closed
1/15/2011	8:36:12 PM	Main Vac valve closed
1/15/2011	8:36:12 PM	Bubbler valve closed
1/15/2011	8:36:12 PM	Bypass valve opened
1/15/2011	8:36:12 PM	Helium MFC set to  0.000000
1/15/2011	8:36:12 PM	H2 MFC set to  0.000000
1/15/2011	8:36:12 PM	BCl3 MFC set to  0.000000
1/15/2011	8:36:12 PM	PHl3 MFC set to  0.000000
1/15/2011	8:36:12 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:36:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:36:12 PM	Tube furnace set to 0
1/15/2011	8:36:44 PM	Helium valve closed
1/15/2011	8:36:44 PM	H2 valve closed
1/15/2011	8:36:44 PM	BCl3 valve closed
1/15/2011	8:36:44 PM	PH3 valve closed
1/15/2011	8:36:44 PM	SiCl4 pre valve closed
1/15/2011	8:36:45 PM	SiCl4 post valve closed
1/15/2011	8:36:45 PM	Bubbler valve closed
1/15/2011	8:36:45 PM	Main Vac valve opened
1/15/2011	8:36:45 PM	Bypass valve opened
1/15/2011	8:36:45 PM	Helium MFC set to  0.000000
1/15/2011	8:36:45 PM	H2 MFC set to  0.000000
1/15/2011	8:36:45 PM	BCl3 MFC set to  0.000000
1/15/2011	8:36:45 PM	PHl3 MFC set to  0.000000
1/15/2011	8:36:45 PM	SiCl4 MFC set to  0.000000
1/15/2011	8:36:45 PM	Bypass solenoid MFC set to  0.000000
1/15/2011	8:36:45 PM	Tube furnace set to 0
1/15/2011	8:36:45 PM	Run finished at 8:36 PM
1/15/2011	8:36:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
